Title Page
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Conducted on
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Prepared by
1) Cleaning Fumehood/Spin coater Fumehood/ Fumehood 3
Cleaning Fumehood
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No dust/visible particles/spills
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Hotplates in good condition
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IPA/Acetone/DCM/DI H2O are refilled
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Under Hood cabinets are cleaned
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Sash clean is done
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All gas/vacuum valves are closed
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Spin Coater Fumehood
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No dust/visible particles/spills.
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Hotplates in good condition.
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IPA/Acetone/DCM/DI H2O are refilled.
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Under Hood cabinets are cleaned.
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Sash clean is done.
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Spin coater Hood vacuum clean done.
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All gas/vacuum valves are closed.
Fumehood 3
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No dust/visible particles/spills.
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Hotplates in good condition.
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IPA/Acetone/DCM/DI H2O are refilled.
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Under Hood cabinets are cleaned.
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Sash clean is done.
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ATs, Hood 3, see if PODs protective plastic is clean.
2) Sinks
FeCl3 Sink
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No dust/visible particles/spills.
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No ferric stains.
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Cleaning cloths are in good condition.
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Glassware in cabinets.
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DI H2O/Diluted Aqua Regia bottles are refilled.
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Under sink cabinets have been cleaned.
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Dishwasher soap can is filled.
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FeCl3 free Sink
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No dust/visible particles/spills.
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No ferric stains.
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Cleaning cloths are in good condition.
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Glassware in cabinets.
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DI H2O/Diluted Aqua Regia bottles are refilled.
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Under sink cabinets have been cleaned.
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Dishwasher soap can is filled.
3) Spin etcher area
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No dust/visible particles/spills.
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Chemical cans drawer has been cleaned (wipe down or vacuum cleaned).
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There are no spills inside the chemical pressurised cans.
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All gas/vacuum valves are closed.
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All the chemical bottles on the spill tray are empty and in good condition.
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PIG in the tray is in good condition (change if needed).
4) NILS/Ozone area
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No dust/visible particles.
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Hotplate is in good condition.
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All gas/ vacuum valves are closed.
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No empty sample boxes/trays or samples on the counters.
5) Ovens/ADT/QC room/Growth room
Ovens
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No dust/ visible particles around or underneath the equipment.
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Cabinets/drawers under equipment are clean (change Pigs if needed where they exist).
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Area is tidied up (No dirty wipes, empty boxes, etc.).
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Gas and vacuum valves are closed.
ADT
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No dust/ visible particles around or underneath the equipment.
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Cabinets/drawers under equipment are clean (change Pigs if needed where they exist).
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Area is tidied up (No dirty wipes, empty boxes, etc.).
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Gas and vacuum valves are closed.
Quality Control Room
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No dust/ visible particles around or underneath the equipment.
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Cabinets/drawers under equipment are clean (change Pigs if needed where they exist).
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Area is tidied up (No dirty wipes, empty boxes, etc.).
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Gas and vacuum valves are closed.
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Shipments SAS has no samples, tools or other items.
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QC to Transfer SAS has no samples, empty boxes or other items.
Growth Room
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No dust/ visible particles around or underneath the equipment.
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Cabinets/drawers under equipment are clean (change Pigs if needed where they exist).
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Area is tidied up (No dirty wipes, empty boxes, etc.).
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Gas and vacuum valves are closed.
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6) Nickel area
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No dust/visible particles/spills.
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Hotplates in good condition.
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IPA/Acetone/DCM/DI H2O are refilled.
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Under Hood cabinets are cleaned.
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Sash clean is done.
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Spin coater Hood vacuum clean done.
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ATs, Hood 3, see if PODs protective plastic is clean.
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All gas/vacuum valves are closed.
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No dust/ visible particles around or underneath the equipment.
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Cabinets/drawers under equipment are clean (change PIGs if needed where they exist).
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Area is tidied up (No dirty wipes, empty boxes, etc.).
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Gas and vacuum valves are closed.
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SAS has no empty bottles, tools or other items.
7) Research area
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No dust/visible particles/spills.
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Hotplates in good condition.
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IPA/Acetone/DCM/DI H2O are refilled.
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Under Hood cabinets are cleaned.
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Sash clean is done.
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Spin coater Hood vacuum clean done.
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ATs, Hood 3, see if PODs protective plastic is clean.
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All gas/vacuum valves are closed.
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No dust/ visible particles around or underneath the equipment.
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Cabinets/drawers under equipment are clean (change Pigs if needed where they exist).
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Area is tidied up (No dirty wipes, empty boxes, etc.).
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Gas and vacuum valves are closed.