Title Page

  • Conducted on

  • Prepared by

1) Cleaning Fumehood/Spin coater Fumehood/ Fumehood 3

Cleaning Fumehood

  • No dust/visible particles/spills

  • Hotplates in good condition

  • IPA/Acetone/DCM/DI H2O are refilled

  • Under Hood cabinets are cleaned

  • Sash clean is done

  • All gas/vacuum valves are closed

Spin Coater Fumehood

  • No dust/visible particles/spills.

  • Hotplates in good condition.

  • IPA/Acetone/DCM/DI H2O are refilled.

  • Under Hood cabinets are cleaned.

  • Sash clean is done.

  • Spin coater Hood vacuum clean done.

  • All gas/vacuum valves are closed.

Fumehood 3

  • No dust/visible particles/spills.

  • Hotplates in good condition.

  • IPA/Acetone/DCM/DI H2O are refilled.

  • Under Hood cabinets are cleaned.

  • Sash clean is done.

  • ATs, Hood 3, see if PODs protective plastic is clean.

2) Sinks

FeCl3 Sink

  • No dust/visible particles/spills.

  • No ferric stains.

  • Cleaning cloths are in good condition.

  • Glassware in cabinets.

  • DI H2O/Diluted Aqua Regia bottles are refilled.

  • Under sink cabinets have been cleaned.

  • Dishwasher soap can is filled.

FeCl3 free Sink

  • No dust/visible particles/spills.

  • No ferric stains.

  • Cleaning cloths are in good condition.

  • Glassware in cabinets.

  • DI H2O/Diluted Aqua Regia bottles are refilled.

  • Under sink cabinets have been cleaned.

  • Dishwasher soap can is filled.

3) Spin etcher area

  • No dust/visible particles/spills.

  • Chemical cans drawer has been cleaned (wipe down or vacuum cleaned).

  • There are no spills inside the chemical pressurised cans.

  • All gas/vacuum valves are closed.

  • All the chemical bottles on the spill tray are empty and in good condition.

  • PIG in the tray is in good condition (change if needed).

4) NILS/Ozone area

  • No dust/visible particles.

  • Hotplate is in good condition.

  • All gas/ vacuum valves are closed.

  • No empty sample boxes/trays or samples on the counters.

5) Ovens/ADT/QC room/Growth room

Ovens

  • No dust/ visible particles around or underneath the equipment.

  • Cabinets/drawers under equipment are clean (change Pigs if needed where they exist).

  • Area is tidied up (No dirty wipes, empty boxes, etc.).

  • Gas and vacuum valves are closed.

ADT

  • No dust/ visible particles around or underneath the equipment.

  • Cabinets/drawers under equipment are clean (change Pigs if needed where they exist).

  • Area is tidied up (No dirty wipes, empty boxes, etc.).

  • Gas and vacuum valves are closed.

Quality Control Room

  • No dust/ visible particles around or underneath the equipment.

  • Cabinets/drawers under equipment are clean (change Pigs if needed where they exist).

  • Area is tidied up (No dirty wipes, empty boxes, etc.).

  • Gas and vacuum valves are closed.

  • Shipments SAS has no samples, tools or other items.

  • QC to Transfer SAS has no samples, empty boxes or other items.

Growth Room

  • No dust/ visible particles around or underneath the equipment.

  • Cabinets/drawers under equipment are clean (change Pigs if needed where they exist).

  • Area is tidied up (No dirty wipes, empty boxes, etc.).

  • Gas and vacuum valves are closed.

6) Nickel area

  • No dust/visible particles/spills.

  • Hotplates in good condition.

  • IPA/Acetone/DCM/DI H2O are refilled.

  • Under Hood cabinets are cleaned.

  • Sash clean is done.

  • Spin coater Hood vacuum clean done.

  • ATs, Hood 3, see if PODs protective plastic is clean.

  • All gas/vacuum valves are closed.

  • No dust/ visible particles around or underneath the equipment.

  • Cabinets/drawers under equipment are clean (change PIGs if needed where they exist).

  • Area is tidied up (No dirty wipes, empty boxes, etc.).

  • Gas and vacuum valves are closed.

  • SAS has no empty bottles, tools or other items.

7) Research area

  • No dust/visible particles/spills.

  • Hotplates in good condition.

  • IPA/Acetone/DCM/DI H2O are refilled.

  • Under Hood cabinets are cleaned.

  • Sash clean is done.

  • Spin coater Hood vacuum clean done.

  • ATs, Hood 3, see if PODs protective plastic is clean.

  • All gas/vacuum valves are closed.

  • No dust/ visible particles around or underneath the equipment.

  • Cabinets/drawers under equipment are clean (change Pigs if needed where they exist).

  • Area is tidied up (No dirty wipes, empty boxes, etc.).

  • Gas and vacuum valves are closed.

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