Operator Daily Audit Form (Booth)

• Conducted on

  Date

• Prepared by

  Select Mike Keith Scott Chris Cory Savannah Matt Jeff Other

  • Mike
  • Keith
  • Scott
  • Chris
  • Cory
  • Savannah
  • Matt
  • Jeff
  • Other

• Your Name

• Crew

  A

  B

  C

  D

• Coating

• Shift

  Days 7am-7pm

  Nights 7pm-7am

CONTROL BOOTH:

• Are you running annealed or temprable?

  Annealed

  Temperable

• is slot 58 on? make sure power supply is outputting voltage and kW

  Yes

  No

  N/A

• Is slots 56 and 60 on? make sure power supply is outputting voltage and kW

  Yes

  No

  N/A

• Using a flashlight, inspect the leading and trailing edge of a lite for scratches

  Yes

  No

  N/A

• Verify powder (Lucite) - inspect for even adequate coverage using a flashlight shining across the edge of the glass.(This Check Needs To Be Completed At Least 5-6 Lites In A Row) The powder control may only be adjusted by Booth Operator or Management

  Pass

  Fail

  N/A

• Is the optoplex clean? is the correct recipe loaded?

  Pass

  Fail

  N/A

• Is the ISRA bottom light clean and operating correctly?

  Pass

  Fail

  N/A

• Is the Chip Blower on?

  Pass

  Fail

  N/A

• Review power supply output (voltage, current, kW) does input = output?

  Yes

  No

  N/A

• Are any power supply's Arcing?

  Yes

  No

  N/A

• List slot or slots

• have any cathodes flipped metallic (Voltage>600)

  Yes

  No

  N/A

• List lid or lids

• Check TMP page, are any TMP currents higher than 4 amps?

  Yes

  No

  N/A

• list which slot or slots that are effected

• Check MFC page, are all mfc outputting correctly

  Yes

  No

  N/A

Coater

• Inspect nitrogen bottle levels (check flow) target psi is 45

  Yes

  No

  N/A

• Check sputter section 1 view ports (are there any rolls or targets that don't look normal?

  Yes

  No

  N/A

• Report any issues

• Check sputter section 2 view ports (are there any rolls or targets that don't look normal?

  Yes

  No

  N/A

• Report any issues

• Check sputter section 3 view ports (are there any rolls or targets that don't look normal?

  Yes

  No

  N/A

• Report any issues

• Check sputter section 4 view ports (are there any rolls or targets that don't look normal?

  Yes

  No

  N/A

• Report any issues

• Check sputter section 5 view ports (are there any rolls or targets that don't look normal?

  Yes

  No

  N/A

• Report any issues

• Check sputter section 6 view ports (are there any rolls or targets that don't look normal?

  Yes

  No

  N/A

• Report any issues

  Yes

  No

  N/A

• Is the plasma lit in all current slots that you are running

  Yes

  No

  N/A

• Is the plasma stable?

  Yes

  No

  N/A

• Is all the proper shielding in place (are there any obvious issues with the side or floor shields)

  Yes

  No

  N/A

• Are there any audible sounds

  Yes

  No

  N/A

• Report any issues

• Is there any other issues with any slots?

  Yes

  No

  N/A

• Are there any water leaks? (on the pump side of the coater or underneath)

  Yes

  No

  N/A

• Where is the Leak?

• Are all of the Targets turning?

  Yes

  No

  N/A

• NOTES:

• Any Additional Pictures Of Issues

  Media

• Supervisors Signature:

  Sign