표제지

  • 수행일

  • 작성자

감사

  • SUMMURY

INSTRUMENT REPORT

  • Before the INSPECTION _INSTRUMENT VALIDATION

  • VALIDATION FAILED? WHICH STEP?

  • How did you solve the problems?(error code)

  • After the INSPECTION_INSTRUMENT VALIDATION

INSTRUMENT HISTORY

  • Backingline pressure _Closed (mtorr)

  • UPS Chamber Vacuum(torr)

  • DWS Chamber Vacuum(torr)

  • Source pressure(Set/Reading)

  • Bottle Pressure(Set/Reading)

  • Detector Voltage(Set/Reading)(KV)

  • Flowtube Pressure (Closed/Open)(mtorr)_Inlet block check

  • Injection Scan ( H3O+/NO+/O2+)(nA)

  • Tune on Reagent Scan (( H3O+/ NO+/ O2+ )

  • UPS LENS_Lens 1 / Lens 2 / Lens 3/Lens 4 / Prefilter / Axial bias / Lens5 / Lens 6 / LensE / FT

  • DWS LENS_Lens E/ Lens1/ IG Bias / IG RF / Lens2 / Lens3/ Lens4 / Prefilter / Axial Bias / Lens 5

  • DWS VALIDATION COUNT(19,28,78,106,150,186,236)

  • DATA Storage (df .)

  • Remaining amount of STADARD GAS

  • Special NOTE

  • ATTACHMENT

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